JPS5315253U - - Google Patents
Info
- Publication number
- JPS5315253U JPS5315253U JP9662976U JP9662976U JPS5315253U JP S5315253 U JPS5315253 U JP S5315253U JP 9662976 U JP9662976 U JP 9662976U JP 9662976 U JP9662976 U JP 9662976U JP S5315253 U JPS5315253 U JP S5315253U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9662976U JPS5315253U (en]) | 1976-07-20 | 1976-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9662976U JPS5315253U (en]) | 1976-07-20 | 1976-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5315253U true JPS5315253U (en]) | 1978-02-08 |
Family
ID=28707037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9662976U Pending JPS5315253U (en]) | 1976-07-20 | 1976-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5315253U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58158437U (ja) * | 1982-04-16 | 1983-10-22 | 昭和電工株式会社 | ウエハ−容器 |
-
1976
- 1976-07-20 JP JP9662976U patent/JPS5315253U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58158437U (ja) * | 1982-04-16 | 1983-10-22 | 昭和電工株式会社 | ウエハ−容器 |